| 摘要 |
<p>PURPOSE:To form a uniformly coated color filter with high precision by a method wherein, before forming the color filter, a recessed part is filled up and after forming the color filter, a buried layer is removed. CONSTITUTION:A substrate is coated with a positive type photo-sensitive polymer 21a in a film thickness capable of sufficiently filling a deep stepped part such as a scribe line 3, etc., therewith. Successively, the part needless to fill up the stepped part is irradiated with light using a photomask 30 to be developed for removal so that a buried layer 21 may be formed. A flattened layer 4, the first color filter layer 7, an intermediate dye-preventing layer 5, the second color filter layer 8, a protective layer 6 are successively formed through the intermediary of an interlayer film comprising a positive type photosensitive polymer. Finally, any needless transparent polymers 4, 5, 6 and the buried layer 21 on the bonding pad and scribe line 3 are collectively exposed and developed to be removed using another photomask 34. Through these procedures, a uniformly coated color filter can be formed with high precision.</p> |
