Arrangement and method for the production of coupling regions for three-dimensionally arranged waveguides

摘要

The invention relates to an arrangement and a method for the production of coupling regions for three-dimensionally arranged waveguides. If the waveguide region and coupling region consist of a uniform sequence of layers, the lengths of the coupling regions are determined by doped separation zones. On the other hand, waveguide region and coupling region can consist of different sequences of layers, on whose boundary surfaces step changes in refractive index occur. By additional separation zones, the lengths of the coupling regions are determined. Electro-optical control of the electromagnetic waves in the wave-guiding semiconductor layers is carried out either via layers in the coupling region which conduct well or via electrodes led up to the wave-guiding layers at the side.