| 摘要 |
The sharpness of an image produced in a layer of photoresist by imagewise exposure of said layer from a light source emitting light of a predetermined wavelength is improved by providing a contrast-enhancing layer comprising a novel photobleachable compound between the light source and the photoresist layer. The novel photobleachable compound is an aryl nitrone having an absorption maximum in the range of 300-450 nanometers selected from alpha -(4-diethylaminophenyl)-N-phenylnitrone, alpha -(4-diethylaminophenyl)-N-(4-chlorophenyl)nitrone, alpha -(4-diethylaminophenyl)-N-(3,4-dichlorophenyl)nitrone, alpha -(4-diethylaminophenyl)-N-(4-ethoxycarbonylphenyl)nitrone, alpha -(4-diethylaminophenyl)-N-(4-acetylphenyl)nitrone, alpha -(9-julolidinyl)-N-phenylnitrone, alpha -(9-julolidinyl)-N-(4-chlorophenyl)nitrone, alpha -(4-dimethylaminophenyl)-N-(4-cyanophenyl)nitrone, alpha -(4-methoxyphenyl)-N-(4-cyanophenyl)nitrone, alpha - [ 2-(1-phenylpropenyl)] -N-phenylnitrone, and alpha -[2-(1,1-diphenylethenyl)]-N-phenylnitrone. |
