发明名称 Method of testing conductor film quality.
摘要 <p>A method of testing the quality of a conductor film laminated onto a surface of a substrate, is carried out by the steps of mounting a testing stand (8) having a T-shaped cross section on the surface of the substrate (1), the testing stand (8) being provided with an undercut portion (9) around the entire periphery thereof, laminating a conductor film (10b) having a predetermined thickness on the surface of the substrate (1), and forming on the top surface of the testing stand (8) a wiring pattern (4) formed with a conductor film (10a) insulated from the first mentioned conductor film (10b) laminated onto the substrate (1). An electric current is then applied to the wiring pattern (4). Characteristics testing of the conductor film can therefore be performed immediately after the laminating of the conductor film to significantly reduce the testing time.</p>
申请公布号 EP0360967(A2) 申请公布日期 1990.04.04
申请号 EP19890106904 申请日期 1989.04.18
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 TEZAKI, ATSUMU;OKUMURA, KATSUYA
分类号 G01R31/26;G01R31/28;H01L21/66 主分类号 G01R31/26
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