PROCESS AND APPARATUS FOR TREATING WAFERS WITH PROCESS FLUIDS,申请号GB19860019700-传众专利搜索

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发明名称	PROCESS AND APPARATUS FOR TREATING WAFERS WITH PROCESS FLUIDS
摘要
申请公布号	GB2185444(B)	申请公布日期	1990.04.04
申请号	GB19860019700	申请日期	1986.08.13
申请人	PAULINE HULDA * BRONNER;DONALD RUSSELL * COOPER;MARGARET CRAM * COOPER;HOWARD THOMAS * HALLOWELL JR;DOROTHY WILLITS * HALLOWELL;JOHN NOBLE * MCCONNELL;BETTY KETCHAM * MCCONNELL;HENRY RUDOLF * SCHELLING;PETER JOHN * TAYLOR;FAYE LYNN VAN * WERT;SYDNEY * WEEN;MERRITT NOXON * WILLITS 3RD;* CFM TECHNOLOGIES LIMITED PARTNERSHIP;* CFM TECNOLOGIES INC	发明人	CHRISTOPHER F * MCCONNELL;ALAN E * WALTER
分类号	H01L21/306;B05B3/04;B05C3/109;B08B3/04;B08B3/08;B08B3/10;B08B7/00;C23C16/54;C30B33/00;H01L21/00;H01L21/304;H01L21/673;H01L21/677	主分类号	H01L21/306
代理机构		代理人
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