| 摘要 |
PURPOSE:To easily realize reproducible continuity between conductors by providing a carbon layer at the contact area of conductor layers in a multi-layer conductor structure. CONSTITUTION:A conductive layer 12 is formed on a insulator substrate or substrate or substrate having insulation film and the first conductive layer consisting of a carbon layer 13 is formed also thereon. Thereafter, the second conductive layer 14 is formed by partly or entirely stacking thereon. The sputter evaporation etc. is used for film formation and the suppter etching etc. is used for manufacturing. Paticularly, after the carbon layer is deposited, the dry etching method is employed. The reactive sputter etching is effective for selective elimination of only the carbon layer. This constitution is particularly effective for the Al system conductor because any oxide is not formed due to existence of the carbon layer and continuity between both conductor layers can be attained easily with excellent reproducibility. When the thickness of carbon layer is selected to several tens of Angstrom to several hundreds of Angstrom , a contact resistance can also be neglected. |
