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发明名称
METHOD FOR GROWING SINGLE CRYSTAL
摘要
申请公布号
JPH0292890(A)
申请公布日期
1990.04.03
申请号
JP19880245065
申请日期
1988.09.28
申请人
NEC CORP
发明人
UEHARA KANEO
分类号
C30B15/20;H01L21/208
主分类号
C30B15/20
代理机构
代理人
主权项
地址
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