ETCHING AND ASHING DEVICE,申请号JP19880243449-传众专利搜索

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发明名称	ETCHING AND ASHING DEVICE
摘要
申请公布号	JPH0293082(A)	申请公布日期	1990.04.03
申请号	JP19880243449	申请日期	1988.09.28
申请人	ULVAC CORP	发明人	MORI KATSUHIKO;SHIMIZU AKIRA
分类号	C23F4/00;H01L21/302;H01L21/3065	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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