发明名称 PRODUCTION OF CERAMIC THIN FILM
摘要 PURPOSE:To obtain a dense, smooth ceramic thin film by hydrolysis of a metal alkoxide while preventing direct contact between oily and aqueous phases through a molecular layer of an organic compound oriented at the interface between said two phases to gently proceed with the reaction. CONSTITUTION:(A) A two-liquid phase interface between an aqueous medium phase and water-insoluble medium (oily phase) is formed, (B) an adsorbable organic compound of orientation nature (e.g., staearic acid) is oriented, in advance, at this interface to form a molecular layer film, (C) a metal alkoxide compound (e.g., aluminum triisopropoxide) is dissolved in the oily phase, (D) a metal alkoxide compound is gently, uniformly hydrolyzed through this molecular layer film and also through the gap between the oriented molecules at the above interface, and (E) the resultant hydrolyzate, i.e., a ceramic precursor thin film is calcined, thus obtaining the objective ceramic thin film excellent in surface smoothness and surface denseness.
申请公布号 JPH0292854(A) 申请公布日期 1990.04.03
申请号 JP19880239866 申请日期 1988.09.27
申请人 NGK SPARK PLUG CO LTD 发明人 ANDO MIGIWA;AOKI HIDEYASU;KATO TAKASHI;MIZUSHIMA YASUYUKI
分类号 C04B35/622;B01J19/00;C01B13/14;C04B35/00 主分类号 C04B35/622
代理机构 代理人
主权项
地址