SHEET PLASMA-TYPE CVD DEVICE,申请号JP19880245730-传众专利搜索

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发明名称	SHEET PLASMA-TYPE CVD DEVICE
摘要
申请公布号	JPH0293073(A)	申请公布日期	1990.04.03
申请号	JP19880245730	申请日期	1988.09.29
申请人	CHUGAI RO CO LTD	发明人	ABE KOZO
分类号	C23C16/50	主分类号	C23C16/50
代理机构		代理人
主权项
地址

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