| 摘要 |
PURPOSE:To manufacture a thin film solar cell wherein a step-coverage problem is eliminated by conducting a dividing step for a metal electrode film at first, forming conducting members and insulating members on a transparent electrode film, and conducting a step for applying energy as a last step. CONSTITUTION:A metal electrode film 7A is formed on an insulating substrate 1. The substrate 1 is held so that the film 7A becomes the lower surface. An energy beam is projected from the upper part of the substrate 1, and groove parts 3A in the direction of the width are formed in the film 7A. Thus the film 7A is divided into a plurality of regions. A semiconductor film 6 comprising amorphous Si having a PIN junction is formed on the substrate 1. Then, a transparent electrode film 2 comprising an ITO is formed on the film 6. Strip shaped conductor members 4 and insulating members 5A are formed in close proximity in parallel with the groove parts 3A on the film 2. The conductor members 4, the film 2 and the film 6 are fused and mixed, and a part of the metal electrode film 7A directly beneath the film 6 is fused. At this time, the film 2 and the film 7 are fused and bonded through a fused parts 8. Then, the film 6 is divided into a plurality of optoelectronic transducer regions. |
