CONCENTRATOR FOR FLUOROCARBON CONTAINING GAS

摘要

PURPOSE:To improve the concentration rate of a fluorocarbon containing gas by providing opposite regeneration chambers on each side of a rotor consisting of the honeycomb structure containing an active carbon as the main component and an adsorption chamber enclosed by the wall surfaces of the regeneration chambers and rotor for passing the gas containing fluorocarbon in low concentration therethrough. CONSTITUTION:A rotor 1 consisting of a honeycomb structure containing an active carbon as the main component is rotatable about its axis. Opposite regeneration chambers 9 are provided on each side of the rotor 1 sealed by sealing members 6 and 7 for passing a rotor regeneration gas therethrough. An adsorption chamber 10 for passing a gas containing fluorocarbon in low concentration therethrough is enclosed by the wall surfaces of the regeneration chambers 9 and the wall surfaces of the rotor in direct or indirect contact with the sealing members slidably movable with the rotor 1 at the side faces thereof. The aforesaid honeycomb structure contains the active carbon having an average pore diameter of 15-30Angstrom and a fracture strength in the gas passing direction of not less than 30kgf/cm<2>. As a result, a highly concentrated fluorocarbon gas can be obtained with a high rate of concentration.