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发明名称
POSITION CONTROLLER
摘要
申请公布号
JPH0291501(A)
申请公布日期
1990.03.30
申请号
JP19880245125
申请日期
1988.09.29
申请人
OMRON TATEISI ELECTRON CO
发明人
KOSAKA MASATSUNE
分类号
G01B7/34;G01N23/00;G01Q10/04;G01Q10/06;G01Q60/10;H01J37/28
主分类号
G01B7/34
代理机构
代理人
主权项
地址
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