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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0290542(A)
申请公布日期
1990.03.30
申请号
JP19880241011
申请日期
1988.09.28
申请人
HITACHI LTD
发明人
TANAKA HIROYUKI;KANEDA AIZO;SERIZAWA KOJI
分类号
H01L21/60
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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