| 摘要 |
PURPOSE:To prevent a solar cell from deteriorating and decreasing in an output power due to the mutual diffusion between an amorphous semiconductor layer and aluminum when the temperature of the solar cell rises up to 60 deg.C or more by a method wherein an oxidation preventing film is formed on a transparent electrode, a mutual diffusion preventing film is formed on an amorphous silicon semiconductor layer, and moreover an aluminum electrode is built. CONSTITUTION:A metal film or a metal silicide layer is formed on a part where a amorphous silicon semiconductor layer 3 has removed through the irradiation with laser rays and on the rest part at the same time. An oxidation preventing film 5 of an aluminum electrode 4 is provided to a contact part 4a of the aluminum electrode 4 with a transparent electrode 2, and a mutual diffusion preventing film 6 is provided to a contact part 4b of the aluminum electrode 4 with the amorphous silicon semiconductor layer 3. Therefore, the transparent electrode 2 is prevented from oxidizing the aluminum electrode 4 through the contact part 4a, and concurrently as the mutual diffusion preventing film 6 is provided, the mutual diffusion between the aluminum electrode 4 and all n-type amorphous silicon layer 3c is prevented. By this setup, a solar cell can retain its output power for a long period without deteriorating in property. |
