PYROELECTRIC TYPE INFRARED SOLID IMAGE PICKUP DEVICE

摘要

PURPOSE:To make the area of a silicon chip smaller than a pyroelectric thin film and to reduce the cost of a CCD by connecting respective driving electrode parts formed for a charged coupled device(CCD) to a 2nd electrode thin film group as driving electrode parts on a sensor part side through conductive metal columns. CONSTITUTION:The pyroelectric thin film 1 has a common electrode arranged on one surface and the 1st electrode thin film group 2 arrayed on the other surface in two dimensions and the 2nd electrode thin film group 3 arrayed at the peripheral are connected to input diodes 6 of respective elements of the CCD 5 and the driving electrode parts 7 through the conductive metal columns 4. Therefore, the take-out electrode parts of the CCD 5 and an external circuit need not be connected by wire bonding, etc., and the take-out electrode parts can be connected to the external circuit by using a low-cost sensor part side. Consequently, the size of the CCD 5 can be minimized, so the number of CCDs 5 obtained from one silicon water increases and the CCDs are reduced in cost.