| 摘要 |
PURPOSE:To surely and easily judge if an element deteriorates in reliability or not by a method wherein a second dielectric film serving as an ultrasonic receiver is provided inside or near the element. CONSTITUTION:A dielectric film 17 serving as a receiver is provided to the vicinity of a dielectric film 16 which serves as a capacitor facing it. By this setup, the film 17 can receive a strong ultrasonic. Therefore, the deterioration of a semiconductor memory of this design in reliability caused by cracks or peeling can be judged by detecting the intensity of the received ultrasonic. |
