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发明名称
摘要
申请公布号	JPH0247043(U)	申请公布日期	1990.03.30
申请号	JP19880126657U	申请日期	1988.09.28
申请人		发明人
分类号	H01L21/66;H01L21/301;H01L21/78;(IPC1-7):H01L21/66	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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