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发明名称
WAFER HANDLING DEVICE FOR CLEANING WAFER
摘要
申请公布号
JPH0290522(A)
申请公布日期
1990.03.30
申请号
JP19880240759
申请日期
1988.09.28
申请人
TOSHIBA CORP;KURITA WATER IND LTD
发明人
KAMETANI SHIGEJI;IMAIZUMI MASABUMI;INAGAKI KIYOHIKO;OTANI TAIICHI;MASHITA NORIYOSHI
分类号
B65H1/28;B25J15/00;B65G1/00;B65G1/07;H01L21/304
主分类号
B65H1/28
代理机构
代理人
主权项
地址
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