| 摘要 |
PURPOSE:To detect the picture of an aimed part successively while continuously and speedily scanning an object to be detected by automatically adjusting the focal point of a microscope especially to an edge part of the inspection aimed part of the surface of the object positioned at a specified height. CONSTITUTION:By focusing linear image sensors 12 and 13 arranged in parallel to the moving direction of the object 5, detect a picture outputted from the microscope 10 is simultaneously detected. The output picture signals of the focusing linear image sensors 12 and 13 are binarized, and a time-delay signal is also generated, so that the edge position of the object is detected; simultaneously, crest values are found after segmentation is performed by means of a edge position detecting signal. While the difference in the crest values between the output signals of the focusing linear image sensors 12 and 13 is found, the focal point of the microscope 10 is adjusted so that the difference signal is always zero. Thus, the surfaces of parts having stepping parts can be continuously and speedily detected. |
