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经营范围
发明名称
PRUEFKARTENVORRICHTUNG
摘要
申请公布号
DE3931305(A1)
申请公布日期
1990.03.29
申请号
DE19893931305
申请日期
1989.09.20
申请人
ELECTRO SCIENTIFIC INDUSTRIES, INC., PORTLAND, OREG., US
发明人
CLARRIDGE, GLENN E., PORTLAND, OREG., US
分类号
G01R31/26;G01R1/073;G01R31/00;H01L21/66;H01L27/01
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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