MAGNETIC FIELD GENERATOR OF MAGNETRON SPUTTERING DEVICE,申请号JP19880240050-传众专利搜索

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发明名称	MAGNETIC FIELD GENERATOR OF MAGNETRON SPUTTERING DEVICE
摘要
申请公布号	JPH0288770(A)	申请公布日期	1990.03.28
申请号	JP19880240050	申请日期	1988.09.26
申请人	FUJI ELECTRIC CO LTD	发明人	SAKAKIBARA YASUSHI;ARISAWA TAKESHI;KONDO KENJI
分类号	C23C14/35;H01L21/203	主分类号	C23C14/35
代理机构		代理人
主权项
地址

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