THE PRODUCTION OF OXIDE COATINGS BY SPUTTERING TECHNIQUES,申请号EP19890306254-传众专利搜索

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发明名称	THE PRODUCTION OF OXIDE COATINGS BY SPUTTERING TECHNIQUES
摘要
申请公布号	EP0349187(A3)	申请公布日期	1990.03.28
申请号	EP19890306254	申请日期	1989.06.20
申请人	THE BOC GROUP, INC.	发明人	ROSS, RANDALL C.
分类号	C23C14/00;C23C14/08;C23C14/10;C23C14/34;(IPC1-7):C23C14/34	主分类号	C23C14/00
代理机构		代理人
主权项
地址

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