METHOD FOR AUTOMATICALLY SEPARATING USEFUL AND DISTURBING INFORMATION INTO MICROSCOPIC IMAGES, ESPECIALLY OF WAFER SURFACES, FOR THE AUTOMATIC RECOGNITION OF WAFER IDENTIFICATION MARKS

摘要

A method for the automatic separating useful and noise information in microscopic images, particularly, microscopic images of wafer surfaces, for example, upon which printed circuits are formed for automatic recognition of wafer identifications which is divided into an image editing step, a conversion of the image content into a representation by data structures (FIG. 6) and also into actual separating steps for discriminating between noise and useful information. The method allows the automatic recognition of greatly disturbed wafer identifications. It allows then identification contours on a wafer to be reconstructed in an undisturbed manner even where there are extreme disturbances and where there is a very small signal to noise ratio.