Light-sensitive composition.

摘要

A positive working light-sensitive composition comprises (a) a compound capable of generating an acid through irradiation with actinic rays or radiant rays and (b) an organic polysiloxane compound having linear one-dimensional, branched or ladder type two-dimensional and/or three-dimensional network structures. The light-sensitive composition has high sensitivity, large tolerance with respect to light sources and excellent resistnce to oxygen plasma etching. Moreover, the composition is alkali-developable. Therefore, it can be used in preparing presensitized plate for use in making lithographic printing plates, proof sheets for process printing, figures for overhead projectors and in forming fine resist patterns employed for manufacturing IC circuits of semiconductor elements.