发明名称 THERMAL WRITING ON GLASS OR GLASS-CERAMIC SUBSTRATES AND COPPER-EXUDING GLASSES
摘要 There is disclosed a method of producing a transition metal pattern on a glass or glass-ceramic substrate by selective exudation of a transition metal from a glass substrate containing the metal as an oxide. The selective exudation is effected by applying an intense, well-focused source of energy to a glass in a pattern corresponding to the desired metal pattern. This develops localized heating, and thereby causes corresponding localized metal exudation from the glass. The metal pattern may be rendered electroconductive, and may constitute a pattern of interconnecting lines for microcircuitry. There is also disclosed a family of low dielectric, copper-exuding, boroaluminosilicate glasses particularly adapted to use in forming substrates for electronic devices such as integrated circuits. The glasses are capable of exuding copper oxide, have a coefficient of thermal expansion of 30 - 35 x 10<-><7> at 300 DEG C, a dielectric constant not over 5.0 at 100 KHz, a loss tangent not over 0.003 at 100 KHz and consist essentially, in percent by weight, of 56 - 64% SiO2, 18 - 25% B2O3, 3-11% Al2O3, 0-2% CaO, 0 - 2% Li2O, 0 - 1% K2O, and Li2O + K2O + CaO being 1.5 - 3% and 1 - 20% CuO.
申请公布号 EP0311274(A3) 申请公布日期 1990.03.28
申请号 EP19880308745 申请日期 1988.09.21
申请人 CORNING GLASS WORKS 发明人 BOYLAN, ELIZABETH ANN;HULTMAN, SHERYL LYNN;FONG, GERALD DAVID
分类号 C03C3/091;C03C17/06;C03C23/00;H01L21/48;H01L23/15;H05K1/03;H05K3/10;(IPC1-7):C03C17/06;H01L23/14 主分类号 C03C3/091
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