发明名称 Apparatus and process for producing a stable beam of fine particles
摘要 An apparatus for controlling a flow of fine particles is provided which comprises a convergent-divergent nozzle in a flow path of the fine particles. The nozzle may be operated under an optimum expansion condition, and the differential coefficient of the streamline at the channel inside the nozzle varies continuously and is equal to zero at a throat portion of the nozzle.
申请公布号 US4911805(A) 申请公布日期 1990.03.27
申请号 US19870052148 申请日期 1987.05.21
申请人 CANON KABUSHIKI KAISHA 发明人 ANDO, KENJI;CHIBA, YUJI;MASAKI, DECEASED, TATSUO;SUGATA, MASAO;OSABE, KUNIJI;KAMIYA, OSAMU
分类号 C23C14/22;C23C16/44;C23C16/455;F15D1/00 主分类号 C23C14/22
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