| 摘要 |
PURPOSE:To simplify the control of the temp. of a discharged liq. and to prevent the coagulation of gelatin from the tip of a discharge part by controlling the temp. of the gelatin extending from the inside of a container to the discharge part with a liq. having the temp. set by a temp. controller. CONSTITUTION:A pipe 11 for supplying a processing liq. 7 (e.g., gelatin) to a material 20 to be worked (e.g., wafer) and a pipe 28 for supplying a liq. 6 around the pipe 11 are provided. The processing liq. supply pipe 11 is inserted into a fluid supply pipe 28 from the opening of the fluid supply pipe 28 to form the liq. treating device. Consequently, the temp. of the gelatin extending from the inside of the container 8 to the discharge part can be controlled with the liq. 6 having the temp. set by the temp. controller 5, the temp. of the discharge liq. is easily controlled, and the gelatin from the tip of the discharge part is not coagulated. |
