发明名称 Bonding of aligned conductive bumps on adjacent surfaces
摘要 A bump bonding process and product are disclosed in which both pressure and heating are used in situations where the temperature should not exceed a predetermined amount, e.g., bonding of a photoconductor array to a module containing electronic processing devices. The bonding process involves eutectic alloying of indium and bismuth, allowing welding of the bumps at a temperature substantially below the two metals' melting points. In one version of the invention, bumps on adjacent substrates are directly aligned. In another version, each bump on one substrate is wedged between a pair of bumps on the other substrate.
申请公布号 US4912545(A) 申请公布日期 1990.03.27
申请号 US19870097797 申请日期 1987.09.16
申请人 IRVINE SENSORS CORPORATION 发明人 GO, TIONG C.
分类号 H01L21/60;H01L21/603;H01L23/485 主分类号 H01L21/60
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