Method of measuring surface topography by using scanning electron microscope, and apparatus therefor

摘要

Disclosed is a method and apparatus for measurement of surface topography of a sample by using a scanning electron microscope, in which: secondary electrons released from the sample are detected by detectors which are four or an integral multiple of four in number and which are disposed above the sample to surround the sample; differential coefficients in two directions perpendicularly intersecting each other at the scanning point are obtained from the detected signals; the differential coefficients are successively summing-integrated along the two directions thereby obtaining surface topography of the sample; and at the same time the calculation expression for calculating the surface topography is corrected with the sample table inclined.