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发明名称
DEVICE FOR VAPOR GROWTH OF COMPOUND SEMICONDUCTOR
摘要
申请公布号
JPH0286121(A)
申请公布日期
1990.03.27
申请号
JP19880238002
申请日期
1988.09.22
申请人
TOSHIBA CORP
发明人
NISHIBE TORU;SAWADA TOSHIYUKI
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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