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发明名称
Pulsed microfocused ion beams
摘要
申请公布号
US4912327(A)
申请公布日期
1990.03.27
申请号
US19890364202
申请日期
1989.06.09
申请人
VG INSTRUMENTS GROUP LIMITED
发明人
WAUGH, ALLEN R.
分类号
G01Q30/02;G01Q30/04;H01J27/02;H01J49/40
主分类号
G01Q30/02
代理机构
代理人
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地址
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