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发明名称
MANUFACTURE OF ALLOY TARGET FOR SPUTTERING
摘要
申请公布号
JPH0285362(A)
申请公布日期
1990.03.26
申请号
JP19880234403
申请日期
1988.09.19
申请人
MITSUBISHI METAL CORP
发明人
MASHIMA MUNETAKA;FUKUI SOICHI
分类号
C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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