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发明名称
CHEMICAL COOLING METHOD
摘要
申请公布号
JPH0283960(A)
申请公布日期
1990.03.26
申请号
JP19880235001
申请日期
1988.09.21
申请人
HITACHI LTD
发明人
MORIHARA ATSUSHI;NAGANUMA YOSHIO;OUCHI KAZUNORI;YOKOYAMA HIROSHI
分类号
H01L23/473
主分类号
H01L23/473
代理机构
代理人
主权项
地址
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