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发明名称
THIN FILM TRANSISTOR AND ITS MANUFACTURE
摘要
申请公布号
JPH0284774(A)
申请公布日期
1990.03.26
申请号
JP19880236815
申请日期
1988.09.21
申请人
SEIKO EPSON CORP
发明人
KUNII MASABUMI
分类号
H01L27/12;H01L21/336;H01L29/78;H01L29/786
主分类号
H01L27/12
代理机构
代理人
主权项
地址
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