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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0282555(A)
申请公布日期
1990.03.23
申请号
JP19880235588
申请日期
1988.09.19
申请人
HITACHI LTD
发明人
OWADA NOBUO
分类号
H01L21/768;H01L23/522
主分类号
H01L21/768
代理机构
代理人
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地址
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