| 摘要 |
PURPOSE:To obtain a gas laser apparatus having a high efficiency and high reliability by a method wherein the surface of a metallic vessel in which laser medium gas is enclosed is tightly cladded with a metallic layer which is made of metal having a higher conductivity than the material of the vessel and has a thickness equivalent to a skin depth corresponding to the frequency of a high frequency source. CONSTITUTION:A metallic vessel 7 is made of material such as stainless steel which maintains mechanical strength even if it is applied to a welded structure. On the other hand, the surface of the metallic vessel 7 is tightly cladded with a cladding layer 13 made of metal such as copper or aluminum which has a higher conductivity than the material of the metallic vessel 7 by a means such as plating or flame-coating. That is, by selecting the metal which can maintain sufficient mechanical strength even if the welded structure is employed, the metallic vessel can withstand an external force produced by a large pressure difference between enclosed internal gas and the external air. As a high frequency current can be made to flow only in the skin depth part of the surface of the metal layer by a skin effect, if the high conductivity metal cladding layer having the thickness equivalent to the skin depth is applied to the surface of the metallic vessel, the high frequency current is made to flow in the high conductivity metal cladding layer, so that the loss of the high frequency current can be avoided. |
