| 摘要 |
PURPOSE:To improve the accuracy of alignment by moving an XY stage in X and Y directions such that it is directed from a given direction toward a target position. CONSTITUTION:Y-directional vector components of errors at positioning positions for each shot 2 are provided such that the directions thereof are the same for adjacent lines but the magnitudes are reduced. That is, when transfer for a X-directional line is completed and transfered to the next line, an XY stage 12 is once returned to the top of the line. In succession transfer is restarted from the top shot 2 toward the tail of the line for each shot 2. Once transfer concerning the tail of the line is completed, the XY stage 12 is again returned to the top of the next line. Thereafter, with such repeated transfer operation, the transfer for all shots 2 are successively executed. |
