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发明名称
SEMICONDUCTOR COOLING APPARATUS
摘要
申请公布号
JPH0282562(A)
申请公布日期
1990.03.23
申请号
JP19880232466
申请日期
1988.09.19
申请人
HITACHI LTD
发明人
KUWABARA HEIKICHI;NAKAJIMA TADAKATSU;OHASHI SHIGEO;SATO MOTOHIRO
分类号
H01L23/473
主分类号
H01L23/473
代理机构
代理人
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