| 摘要 |
PURPOSE:To improve mass-productivity, realize complete coupling with a sintered Si3N4 board and improve reliability by a method wherein layers of mixture of AlN, zirconium oxide and organic material and layers of mixture of AlN and organic material are alternately printed a plurality of times on the sintered Si3N4 board and baked. CONSTITUTION:Layers of insulator material and layers of material converted into conductor by the reaction at the time of baking are alternately printed a plurality of times on a sintered silicon nitride ceramic board 7 and baked. The insulator material printed on the surface of the ceramic board is composed of mixture of aluminum nitride and organic material. The material converted into conductor by the reaction at the time of baking is composed of a mixture of aluminum nitride, zirconium oxide and organic material. When the mixing ratio of aluminum nitride and zirconium oxide in the mixture of aluminum nitride, zirconium oxide and organic material is expressed by (AlN)x(ZrO2)1-x, zirconium nitride enough to provide a conductivity is made of the mixture having the composition (x)=0.2-0.9. |
