| 摘要 |
PURPOSE:To perform the receipt or delivery of a sample efficiently by forming the structure of expanding a 1st arm by a 1st rotating axis, expanding a 2nd arm by a 2nd rotating axis and simultaneously rotating 1st and 2nd arms by a 3rd rotating axis. CONSTITUTION:By rotating 1st and 2nd rotating axes 5, 6 by motors 8, 9 1st and 2nd arms 1, 2 are extended to face the hand 42 of the arm 1 tip of one part to the cassette inside, for example, and to face the hand 62 of the arm 2 tip of the other part to the process chamber inside. After completion of the process the 1st and 2nd arms are contracted by reversing the 1st and 2nd rotating axes 5, 6, a 3rd rotating axis 7 is rotated by a motor 10 further to change the directions of the 1st and 2nd arms 1, 2, and the 1st and 2nd arms 1, 2 are extended again to input a processed wafer into a specified cassette and an unprocessed wafer into the processing chamber inside respectively. |
