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发明名称
INSPECTION OF LAYOUT DESIGN
摘要
申请公布号
JPH0282637(A)
申请公布日期
1990.03.23
申请号
JP19880235540
申请日期
1988.09.20
申请人
TOSHIBA CORP
发明人
SUSA HIDEYA;NAKAI MASANORI
分类号
H01L21/822;G06F17/50;H01L21/66;H01L27/04
主分类号
H01L21/822
代理机构
代理人
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地址
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