| 摘要 |
<p>A highly damage resistant, multilayer, optical reflective coating (20) includes alternating layers (24, 26) of doped and undoped dielectric material. The doping levels are low enough that there are no distinct interfaces between the doped and undoped layers so that the coating has properties nearly identical to the undoped material. The coating is fabricated at high temperature with plasma-assisted chemical vapor deposition techniques to eliminate defects, reduce energy-absorption sites, and maintain proper chemical stoichiometry. A number of differently-doped layer pairs, each layer having a thickness equal to one-quarter of a predetermined wavelength in the material are combined to form a narrowband reflective coating (20) for a predetermined wavelength. Broadband reflectors (55) are made by using a number of narrowband reflectors, each covering a portion of the broadband.</p> |
