发明名称 PELLICLE FRAME STRUCTURE
摘要 PURPOSE:To enhance adhesion to the frame of a thin pellicle or thin film and to prevent peeling of the pellicle by forming a fine roughened face on the surface of the thin optical film or pellicle to be bonded. CONSTITUTION:The title structure is formed by bonding the thin optical film 1 to the pellicle frame 2 with an adhesive 3, by forming the finely roughened face by >=20% of the area of the film 1 to be bonded, and nitrocellulose can be used for the film 1, and a reflection preventing layer or layers may be formed on one or both sides of the thin film 1. The roughened face can be formed by lightly pressing a roll roughened on the surface to the thin film 1 and rotating the roll and the like method and an epoxy adhesive and the like can be used for the adhesive 3.
申请公布号 JPH0281046(A) 申请公布日期 1990.03.22
申请号 JP19880232649 申请日期 1988.09.19
申请人 ASAHI KASEI DENSHI KK 发明人 AOKI KENJI;TOMOURA SEIICHIROU;ARAKI HIDEKI;MATSUI TAKEKI
分类号 G03F1/64 主分类号 G03F1/64
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