摘要 |
PURPOSE:To enhance adhesion to the frame of a thin pellicle or thin film and to prevent peeling of the pellicle by forming a fine roughened face on the surface of the thin optical film or pellicle to be bonded. CONSTITUTION:The title structure is formed by bonding the thin optical film 1 to the pellicle frame 2 with an adhesive 3, by forming the finely roughened face by >=20% of the area of the film 1 to be bonded, and nitrocellulose can be used for the film 1, and a reflection preventing layer or layers may be formed on one or both sides of the thin film 1. The roughened face can be formed by lightly pressing a roll roughened on the surface to the thin film 1 and rotating the roll and the like method and an epoxy adhesive and the like can be used for the adhesive 3. |