| 摘要 |
<p>PURPOSE:To facilitate keeping on holding held objects during service interruption by a method wherein a vacuum pump equipped with an electric source for service interruption is provided to constitute a system in valves provided on pipings for attracting the held objects can maintain the state before the service interruption even after the service interruption occurs and, further, and accumulator chamber is provided. CONSTITUTION:In an X-ray aligner, for instance, an X-ray is introduced into a stage storing chamber 1 by a mirror cylinder 8. Irradiated objects, i.e., a mask 6 and a wafer 5, are held by a mask chuck 3 and a wafer chuck 4 respectively and, further, the chuck 4 is fixed to a stage 9 and enclosed and stored in the storing chamber 1. A wafer hand 10 which carries the wafer 5 in and out is provided in the storing chamber 1. The mask 6 is held by the chuck 3 mechanically and the wafer 5 on the chuck 4 and the wafer hand 10 is held by a vacuum attracting force and, further, the chuck 4 and the wafer hand 10 are connected to an oil rotary pump 15 through pipings 11 and 12 in which valves 13 and 14 and an accumulator chamber 35 are provided. An electric source 16 and an electric source 17 for service interruption are connected to the oil rotary pump 15 through an electric source changer 37 and, moreover, a vacuum pump 19 is connected to the storing chamber 1.</p> |
