| 摘要 |
<p>PURPOSE:To automate the different processings correspond to the kinds of objects to be processed by registering the contents of the processings with each of senders and executing the processing in accordance with the contents thereof. CONSTITUTION:The recipes corresponding to the senders 1a to 1c are key- inputted and registered to a recipe controller 10 and the cassettes housing the objects to be processed such as semiconductor wafers are set in the senders 1a to 1c. The processing sequence of the objects to be processed is then registered by operating operation switches 2a to 2c and thereafter, the objects to be processed are successively treated by processing units 3 to 5. The processed objects to be processed are subjected to lot control in accordance with the sequence previously registered by the operations of the operation switches 7a to 7c and are housed into the cassettes.</p> |
