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发明名称
PROBE
摘要
申请公布号
JPH0280901(A)
申请公布日期
1990.03.22
申请号
JP19880233260
申请日期
1988.09.17
申请人
NIKON CORP
发明人
SASAGAWA KOICHI;NOSAKA TAKESHI
分类号
G01B1/00;G01B5/00;G01B5/012;G01B5/016;G01B7/00;G01B21/00
主分类号
G01B1/00
代理机构
代理人
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