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发明名称
摘要
申请公布号
JPH0241427(U)
申请公布日期
1990.03.22
申请号
JP19880120108U
申请日期
1988.09.12
申请人
发明人
分类号
G03F1/00;H01L21/265;H01L21/266;H01L21/336;H01L29/78;(IPC1-7):H01L21/266;H01L29/784
主分类号
G03F1/00
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代理人
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