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发明名称
NORMAL PRESSURE CVD APPARATUS
摘要
申请公布号
JPH0281433(A)
申请公布日期
1990.03.22
申请号
JP19880232342
申请日期
1988.09.19
申请人
HITACHI LTD
发明人
SHIMIZU NORIYUKI
分类号
C23C16/44;C23C16/455;C23C16/46;H01L21/205;H01L21/31
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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