| 摘要 |
PURPOSE:To obtain a piezo-electric vibrator with high quality having a high mechanical Q, by eliminating dirt at reaction through the cleaning processing of an oscillating element plate with plasma asher. CONSTITUTION:A metallic electrode film is provided opposingly with both surfaces of a thin plate made of a piezoelectric crystal and a stem is fitted with a conductive resin for an oscillation substrate 8, which is held with a quartz of aluminum-made older 10 in an aluminum-made cylinder 9 with holes and inserted in a reaction chamber 11. After the chamber 11 is exhausted by using a vacuum pump from an outlet 12, a carrier gas is introduced from an introducing hole 13, a high frequency voltage is applied from a coil electrode 6 wound on a quartz reaction tube 5 from a power supply 7 when the vacuum becomes constant, and plasma asher processing is performed. |
